Mass flow meters & controllers

Keywords www.vacuum-guide.com

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leak detector residual gas analysis vacuum measurement vacuum components

AMERICA Asia Pacific Europe

 

ADVANCED ENERGY INDUSTRIES, INC. - www.advanced-energy.com - 1625 Sharp Point Drive, Fort Collins, CO 80525, USA email, Tel. 800 446 9167 AE focuses on high-growth applications, including solar cell, passive-solar architectural glass, solar grid-tie inverter, semiconductor, flat panel display, data storage, and other advanced processes. AE's product portfolio includes precise, flexible electrical power systems, reliable gas and liquid flow-management systems, accurate thermal instruments, and global support services.

products: Flow management Thermal-based Mass Flow Controllers Thermal-based Mass Flow Meters Pressure-Based Mass Flow Controllers LIQUID Mass Flow Controllers ROD4-A Mass Flow Control Unit Exhaust Pressure Controllers Material Delivery Systems

Alicat Scientific, Incorporated - www.alicat.com - 7641 N. Business Park Drive, Tucson, AZ 85743, USA email, Tel. (888) 290 6060 Founded: 1991, Tucson, Arizona ; Acquired: 2010 by Halma plc More than 100,000 Alicat mass flow and pressure instruments are in operation around the world.

products: Pressure controllers and mass flow controllers for vacuum coating Fast, responsive gas delivery for PVD and ALD processes Delivery of purge and reactive gases into a vacuum coating system requires fast response and precise control. These innovatively reliable, versatile products are superior to original equipment, in a competitively-priced package.

Apex Vacuum - www.apexvacuum.com - 233 Arnold Mill Road, Woodstock, GA 30188, USA email, Tel. 770-479-7158

products: Mass Flow Controllers and Meters, Battery Powered Mass Flow Meter Power Supply and communication Cables, FlowVision Software for MFC/MFM Pressure Controllers, Vacuum/Pressure Gauges

Brooks Instrument - www.brooksinstrument.com - 407 West Vine Street, Hatfield, PA 19440-0903 USA email: BrooksAM@BrooksInstrument.com, Tel. 888-554-FLOW World's largest installed base of mass flow controllers; one of the most trusted suppliers of mass flow technology to the global semiconductor industry. Brooks holds over 150 active patents, so our product portfolio incorporates multiple patented advances in fundamental fluid measurement and control technology.

products: Metal Sealed Thermal Mass Flow Controllers & Meters Highest-purity flow path. Ultra-precise, contaminant-free control. Many of today's advanced electronic device fabrication processes require extremely accurate and highly repeatable measurement and control of expensive ultra-pure gases and liquid precursors. Brooks Instrument meets those needs with our game-changing metal sealed thermal mass flow controllers and meters. Precise chemistry control is achieved through the combination of ultra-stable, highly accurate measurement sensors, fast precision control valves and powerful digital electronics. Purity of the process chemistry is ensured by our high-integrity (leak tight), ultra-high purity, all-metal wetted flow path, designed to keep outside contaminants like moisture and oxygen from corrupting the process media.

Sierra Instruments, Inc. - www.sierrainstruments.com - 5 Harris Court Building L, Monterey, CA 93940, USA email, Tel. +1 831-373-0200 Founded in 1971 by Dr. John G. Olin, Sierra has long been well known as a manufacturer of high-performance fluid flow measurement and control instrumentation for use in numerous industries and applications throughout the world.

products: Smart-Trak 2® + Compod™ Maintaining a specified gas mass flow rate to the vacuum cham­ber is critical during the PVD process. Typically, vacuum pumping stations require a throttle valve or orifice-limiting device to control the pump's output when the PVD gas is introduced. This method is extremely pressure sensitive and can result in inefficient gas delivery and poor product quality. Sierra's Smart-Trak 2 with Compod automatically com­pensates for changes in system pressure (vacuum pump fluc­tuations) or loss of pressure from the gas source (cylinder depletion). The Smart-Trak® 2 with Compod™ also delivers pre­cisely controlled gas mass flow rate to the vacuum chamber to maintain high quality end-product.

 

 

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